Unintended gas breakdowns in narrow gaps of advanced plasma sources for semiconductor fabrication industry
저자
Sung Hyun Son, Geunwoo Go, Willca Villafana, Igor D Kaganovich, Alexander Khrabrov, Hyo-Chang Lee, Kyoung-Jae Chung, Gwang-Seok Chae, Seungbo Shim, Donghyeon Na, June Young Kim
