저자
June Young Kim, Jae Young Jang, K S Chung, Kyoung-Jae Chung, Y S Hwang
저널 정보
Plasma Sources Sci. Technol. 28, 07LT01
출간연도
2019
링크
https://iopscience.iop.org/article/10.1088/1361-6595/ab2c64
