저자
Jinyoung Choi, Cheongbin Cheon, Y S Hwang, Kyoung-Jae Chung, June Young Kim
저널 정보
Plasma Sources Science and Technology 32, 01LT01
출간연도
2023
링크
https://iopscience.iop.org/article/10.1088/1361-6595/acb28a
