저자
June Young Kim, Jae Young Jang, Jaeyoung Choi, Jong-in Wang, Won Ik Jeong, M A I Elgarhy, Geunwoo Go, Kyoung-Jae Chung, Y S Hwang
저널 정보
Plasma Sources Sci. Technol. 30, 025011
출간연도
2021
링크
https://iopscience.iop.org/article/10.1088/1361-6595/abd455
