Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions - 서울대학교 플라즈마, 방사선 및 이온원 연구실

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Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions

저자

Sung-Ryul Huh, Nam-Kyun Kim, Bong-Ki Jung, Kyoung-Jae Chung, Yong-Seok Hwang, Gon-Ho Kim

저널 정보

Physics of Plasmas 22, 033506

출간연도

2015

링크

https://pubs.aip.org/aip/pop/article/22/3/033506/1079566/Global-model-analysis-of-negative-ion-generation