바로가기 메뉴
본문 바로가기
푸터 바로가기
TOP

Experimental evidence of various mode numbers of azimuthal waves in an E x B Penning source for semiconductor processing

저자

Cheongbin Cheon, Jinyoung Choi, John Bon-Woong Koo,June Young Kim

저널 정보

Plasma Sources Science and Technology 32, 07LT01

출간연도

2023