저자
June Young Kim, Won-Hwi Cho, Jeong-Jeung Dang, Seongcheol Kim, Kyoung-Jae Chung and Y S Hwang
저널 정보
Plasma Sources Sci. Technol. 25, 065019
출간연도
2016
링크
https://iopscience.iop.org/article/10.1088/0963-0252/25/6/065019
