저자
June Young Kim, Jinyoung Choi, Jaeyoung Choi, Y S Hwang, Kyoung-Jae Chung
저널 정보
Plasma Sources Science and Technology 31, 05LT02
출간연도
2022
링크
https://iopscience.iop.org/article/10.1088/1361-6595/ac6a76
