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Brightness enhancement of plasma ion source by utilizing anode spot for nano applications

저자

Yeong-Shin Park, Yuna Lee, Yoon-Jae Kim, Man-Jin Park, Dae Won Moon, Kyoung-Jae Chung, Y. S. Hwang

저널 정보

Review of Scientific Instruments 83, 02B313

출간연도

2012